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300mm RECLAIM 客戶規格詢問表
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Item Specification Psi Standard Spec
GENERAL CHARACTERISTICS
 
Type Follow customer spec.
Resistivity Follow customer spec.
Diameter 200 ± 0.25 mm
Edge Exclusion 5mm
Thickness Follow customer spec.
Total Thickness Variation (TTV) ≦25 µm
Bow ≦50 µm
Warp ≦50 µm
 
SURFACE PARTICLE
 
LPD (Particle) Please provide KLA-SP1 recipe, or follow Psi standard setting.
 
FRONT SIDE SURFACE CHARACTERISTICS
 
Scratches Macro: None                                 
Micro: Follow customer spec. (SP1)
Edge Chips None
Crack / Slip None
Laser Mark None, or specify by customer.
Film None
Metal Contamination Al, Na, Ca, K <= 5.0 E10
Fe, Cu, Zn, Co <= 1.0 E10
 
BACK SIDE SURFACE CHARACTERISTICS
 
Scratches Total Length: ≦200 mm
Pits / Dimple None
Laser Mark None, or specify by customer.
Film None
PACKAGE
 
Box Type Follow customer request.
Label Format / Information Follow customer request.
 
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